Diode ion vacuum pumps NMD-0,063 and NMDI-0,063
Diode ion vacuum NMD-0,063 pumps are used for oil-free extraction of gases and gas mixtures (air) from vacuum systems and creation of high and ultrahigh vacuum. Diode ion vacuum pumps NMD-0,063 are used as a part of vacuum processing equipment.
Diode ion vacuum pumps NMD-0,063 are not intended for extraction of inert gases and continuous pumping of hydrogen (inert gases and hydrogen can be pumped only as impurities to chemically active gases with atomic weight higher than 14). Their capacity is reduced if they are used to pump hydrocarbons. Inert gases can be extracted by diode ion vacuum pumps NMDI-0,063.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Ion pumps are powered by special power supply units (further – BPM), not included in the delivery package of the pump.
Diode ion vacuum pumps NMD-0,063 are produced in two modifications of the connecting flange to the pump body: according to OST 11 868.007 (FO) and according to GOST 26526 (FG).
NOTE: Power supply units BPM for diode ion vacuum the pumps are supplied by a separate order, together with the pump or separately. Key features of NMD-0,063 and NMDI-0,063 vacuum pumps are shown in the table below. Design and basic dimensions of counter flanges of diode ion vacuum pumps are shown in the Appendix. Basic specifications of BPM power supply units recommended for our pumps are shown in with General specifications of ion vacuum pumps.
Specifications of NMD-0,063 and NMDI-0,063 diode ion vacuum pumps
Parameter |
NMD-0,063 |
NMDI-0,063 |
|
Maximum speed, l/sec (± 20 %) |
- with nitrogen |
60 |
50 |
- with argon |
- |
10 |
|
Maximum starting pressure, Pa |
1 |
1 |
|
Maximum working pressure, Pa |
2,0*10-3 |
2,0*10-3 |
|
Ultimate residual pressure, Pa |
8,0*10-8 |
8,0*10-8 |
|
Recommended power supply unit |
BPM-0,25; VAK 1200 |
BPM-0,25; VAK 1200 |
|
Weight (+5 %), kg |
23 |
23 |
|
Connecting flange of the pump body according to OST 11 868.007 (FO) |
- Dn, mm |
100 |
100 |
- Pump dimensions (+5 max), mm |
320 х 200 х 325 |
320 х 200 х 325 |
|
Connecting flange of the pump body according to GOST 26526 (FG) |
- Dn, mm |
100 |
100 |
- Pump dimensions (+5 max), mm |
320 х 160 х 335 |
320 х 160 х 335 |
|
Our company Prizma LLC can design and manufacture other vacuum equipment similar to the available equipment, but with different parameters according to the customer’s specifications.