Design and basic dimensions of high-vacuum counter flanges of ion pumps
Toothed high-vacuum flanges 25,32, 40 OST 11 868.007 (counter flanges to NMD vacuum pumps (I)-0,0063 FO, NMD (I)-0,016 FO)
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Dn |
D |
D1 |
D2 |
D3 |
D4 |
D5 |
D6 |
а, ° |
d |
n |
Pump |
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25 |
85 |
62 |
30 |
80 |
35 |
30 ± 0,14 |
65 |
90 |
11 |
4 |
NMD (I)-0,0063 FO |
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32 |
92 |
70 |
36 |
86 |
45 |
40 ± 0,17 |
72 |
90 |
11 |
4 |
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40 |
110 |
80 |
45 |
105 |
50 |
45 ± 0,17 |
90 |
45 |
13 |
8 |
NMD (I)-0,016 FO |
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Toothed high-vacuum flanges 100, 160 OST 11 868.007 (counter flanges to NMD vacuum pumps (I)-0,025 FO, NMD (I)-0,063 FO, NMD (I) (I) (OI)-0,1 FO, NMD (I)-0,16 FO, NMD (I) (O)-0,25 FO, NMD (I)-0,4 FO)
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Dn |
D |
D1 |
D2 |
D3 |
D4 |
D5 |
D6 |
H |
H1 |
d |
n |
Pump |
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100 |
200 |
148 |
108 |
190 |
130 |
125 ± 0,13 |
180 |
16 |
18 |
14 |
12 |
NMD (I)-0,025 FO, NMD (I)-0,063 FO, NMD (I)-0,1 FO, NMD (OI)-0,1 FO, NMD (I)-0,16 FO |
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160 |
280 |
215 |
168 |
270 |
195 |
190 ± 0,15 |
250 |
19 |
21 |
16 |
16 |
NMD (I)-0,25 FO, NMD (O)-0,25 FO, NMD (I)-0,4 FO |
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Toothed high-vacuum flanges 250 OST 11 868.007 (counter flange to NMD pumps (I)-0,63 FO, NMD (I)-1 FO)
High-vacuum motionless flanges with plain mounting holes Dn-(40, 100, 160, 250) GOST 26526 (counter flanges to NMD pumps (I)-0,016 FG, NMD (I)-0,025 FG, NMD (I)-0,063 FG, NMD (I)-0,1 FG, NMD (I)-0,16 FG, NMD (I) (O)-0,25 FG, NMD (I)-0,4 FG, NMD (I)-0,63 FG, NMD (I)-1 FG
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Dn |
D |
D0 |
D1 |
D2 |
D3 |
D4 |
H |
H1 |
d |
d1 |
n |
a |
Pump |
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40 |
35 |
58.7 |
41.8 |
48.3 |
70 |
38.5 |
13 |
18 |
M6 |
6,6 |
6 |
60° |
NMD (I)-0,016 FG |
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100 |
100.4 |
130.2 |
115.2 |
120.7 |
152 |
104.5 |
21 |
26 |
M8 |
8,4 |
16 |
22,5° |
NMD (I)-0,025FG, NMD (I)-0,063FG, NMD (I)-0,1 FG, NMD (I)-0,16 FG |
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160 |
150 |
181 |
166 |
171.5 |
202 |
160.6 |
23 |
27 |
20 |
18° |
NMD (I)-0,25 FG, NMDO-0,25 FG, NMD (I)-0,4 FG |
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250 |
250 |
284 |
267.5 |
273 |
305 |
256 |
25 |
30 |
32 |
11,25° |
NMD (I)-0,63 FG, NMD (I)-1 FG |
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